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Amorphous (100) platelet formation in (100)Si induced by hydrogen plasma treatment Hwang, KH; Park, JW; Yoon, E; Whang, KW; Lee, JeongYong, JOURNAL OF APPLIED PHYSICS, v.81, no.1, pp.74 - 77, 1997-01 |
Mechanism of surface roughness in hydrogen plasma-cleaned (100)silicon at low temperatures Hwang, KH; Yoon, EJ; Whang, KW; Lee, JeongYong, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.144, no.1, pp.335 - 339, 1997-01 |
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