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(A) study on the material, electrical and reliability properties of $Hf_{0.5}Zr_{0.5}O_2$ based ferroelectric devices with $RuO_2$ electrodes by atomic layer deposition = 원자층 증착법을 이용한 루테늄 옥사이드 산화물 전극에 따른 하프늄-지르코늄 옥사이드 기반 강유전체 소자의 물성 분석, 전기적 특성과 신뢰성 특성 연구link Cho, Sung Hyun; Park, Sang Hee; et al, 한국과학기술원, 2019 |
Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO2 Electrode Goh, Youngin; Cho, Sung Hyun; Park, Sang-Hee Ko; Jeon, Sanghun, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.67, no.8, pp.3431 - 3434, 2020-08 |
Oxygen vacancy control as a strategy to achieve highly reliable hafnia ferroelectrics using oxide electrode Goh, Youngin; Cho, Sung Hyun; Park, Sang-Hee Ko; Jeon, Sanghun, NANOSCALE, v.12, no.16, pp.9024 - 9031, 2020-04 |
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