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Additive Soft-Lithographic Patterning of Submicrometer- and Nanometer-Scale Large-Area Resists on Electronic Materials Ahn, Heejoon; Lee, Keonjae; Shim, Anne; Rogers, John A; Nuzzo, Ralph G., NANO LETTERS, v.5, no.12, pp.2533 - 2537, 2005-10 |
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors Ahn, Heejoon; Lee, Keon Jae; Childs, William R.; Rogers, John A.; Nuzzo, Ralph G.; Shim, Anne, JOURNAL OF APPLIED PHYSICS, v.100, no.8, 2006-10 |
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors Ahn, Heejoon; Lee, Keon Jae; Childs, William R.; Rogers, John A.; Nuzzo, Ralph G.; Shim, Anne, Journal of Applied Physics, Vol.100, 2006 |
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