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Study of Shallow Backside Junctions for Backside Illumination of CMOS Image Sensors Choi, Chung Seok; Yeo, Sang Chul; Kim, Dohwan; Kim, Jongchae; Yoo, Kyung Dong; Lee, Hyuck Mo, JOURNAL OF ELECTRONIC MATERIALS, v.43, no.11, pp.3933 - 3941, 2014-11 |
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