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Universal Patterning for 2D Van der Waals Materials via Direct Optical Lithography Cho, Seong Rae; Ahn, Seonghun; Lee, Seung Hyung; Ha, Heonhak; Kim, Tae Soo; Jo, Min-kyung; Song, Chanwoo; et al, ADVANCED FUNCTIONAL MATERIALS, v.31, no.47, 2021-08 |
광리소그래픽 위상변위마스크용 Si-O-N-F 박막의 모사연구, 증착 과 특성분석 = Simulation and characterization of silicon oxynitrofluoride films as a phase shift mask materiallink 최은철; Choi, Eun-Chul; et al, 한국과학기술원, 2002 |
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