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SOI-based fabrication processes of the scanning mirror having vertical comb fingers Lee, Jin-Ho; Ko, Young-Chul; Jeong, Hee-Moon; Choi, Byoung-So; Kim, Jong-Min; Jeon, Duk Young, Sensors and Actuators A: Physical, Volume 102, Issues 1-2, 1 December 2002, Pages 11-18, 2002 |
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