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Effects of Sr/Ti ratio on the step coverage of SrTiO3 thin films fabricated using electron cyclotron resonance plasma enhanced metal organic chemical vapor deposition Park, SY; Choi, J; No, Kwangsoo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.4A, pp.2456 - 2459, 2001-04 |
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