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Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition Ahn, Ji-Hoon; Kwon, Se-Hun; Kim, Jin-Hyock; Kim, Ja-Yong; Kang, Sang-Won, JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, v.26, no.4, pp.371 - 374, 2010-04 |
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