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Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling Yoo, Jung Ho; Yang, Jun-Mo; Ulugbek, Shaislamov; Ahn, Chi Won; Hwang, Wook-Jung; Park, Joong Keun; Park, Chul Min; et al, JOURNAL OF ELECTRON MICROSCOPY, v.57, no.1, pp.13 - 18, 2008-01 |
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