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Crystalline structure and Cu diffusion barrier property of Ta-Si-N films | [Ta-Si-N Korean source] Jung, Byoung-Hyo; Lee, Won-Jong, KOREAN JOURNAL OF MATERIALS RESEARCH, v.21, no.2, pp.95 - 99, 2011-02 |
구리배선을 위한 Ta-Si-N박막의 미세구조와 확산방지특성에 관한 연구 = Study on the microstructure and diffusion barrier property of Ta-Si-N films for Cu metallizationlink 정병효; Jung, Byoung-Hyo; et al, 한국과학기술원, 2010 |
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