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(A) study on the characteristics of TaN films deposited by ALD using hydrogen plasma = 수소 플라즈마를 이용한 ALD 법으로 증착된 TaN 박막 특성에 관한 연구link Lee, Min-Jung; 이민정; et al, 한국과학기술원, 2001 |
Cu 확산방지용 TCP MOCVD Ta(Si)N 박막 증착 및 특성에 관한 연구 = Deposition and characterization of TCP MOCVD Ta(Si)N thin films as diffusion barrier for Culink 박혜련; Park, Hye-Lyun; et al, 한국과학기술원, 2002 |
Transformer coupled plasma enhanced metal organic chemical vapor deposition of Ta(Si)N thin films and their Cu diffusion barrier properties Park, HL; Byun, KM; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, no.10, pp.6153 - 6164, 2002-10 |
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