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Annihilation behavior of planar defects on phosphorus-doped silicon at low temperatures Im, Dong Hyun; Kim, Yong In; Jeong, Myoungho; Park, Kwang Wuk; Yuk, Jong Min; Kim, Sung Kyu; Nam, Woo Hyun; et al, 제23회 한국반도체학술대회, 한국반도체학술대회, 2016-02-23 |
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