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DC reactive magnetron sputtering 방법으로 증착된 MCM용 비정질 $Ta_2O_5$ 박막 커패시터에 관한 연구 = A study on the amorphous $Ta_2 O_5$ thin film capacitors deposited by DC reactive magnetron sputtering for MCM applicationslink 조성동; Cho, Sung-Dong; et al, 한국과학기술원, 1999 |
Study on the amorphous Ta2O5 thin film capacitors deposited by dc magnetron reactive sputtering for multichip module applications Cho, SD; Paik, Kyung-Wook, MATERIALS SCIENCE & ENGINEERING B: SOLID-STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.67, no.3, pp.108 - 112, 1999-12 |
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