Showing results 1 to 6 of 6
Atomic layer deposition of silicon oxide thin films by alternating exposures to Si(2)Cl(6) and O(3) Lee, Seung-Won; Park, Kwangchol; Han, Byeol; Son, Sang-Ho; Rha, Sa-Kyun; Park, Chong-Ook; Lee, Won-Jun, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.11, no.7, pp.23 - 26, 2008 |
Effect of rapid thermal annealing on the structure and the electrical properties of atomic-layer-deposited Ta2O5 films Kim, YS; Park, SHK; Yun, SJ; Kang, JS, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.37, no.6, pp.975 - 979, 2000-12 |
Investigation of the characteristic changes on SrTiO3 : Pr,Al,Ga phosphors during low voltage electron irradiation Kim, JY; You, YC; Jeon, DukYoung; Yu, I; Yang, HG, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.21, no.1, pp.536 - 539, 2003-02 |
Low-resistivity ruthenium metal thin films grown via atomic layer deposition using dicarbonyl-bis(5-methyl-2,4-hexanediketonato)ruthenium (II) and oxygen Ko, Eun Chong; Kim, Jae Yeon; Rhee, Hakseung; Kim, Kyung Min; Han, Jeong Hwan, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.156, 2023-03 |
Study of the surface reaction kinetics of (La,Sr)MnO3- oxygen carriers for solar thermochemical fuel production Kim, YeonJu; Jeong, Seung Jin; Koo, Bonjae; Lee, Siwon; Kwak, No Woo; Jung, WooChul, JOURNAL OF MATERIALS CHEMISTRY A, v.6, no.27, pp.13082 - 13089, 2018-07 |
Thin-film passivation by atomic layer deposition for organic field-effect transistors Jeon, Hayoung; Shin, Kwonwoo; Yang, Chanwoo; Park, Chan Eon; Park, Sang-Hee Ko, APPLIED PHYSICS LETTERS, v.93, no.16, 2008-10 |
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