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DC magnetron sputtering법을 이용한 Ir 하부전극의 형성 및 특성평가와 $(Ba,Sr)TiO_3$ 박막의 특성 평가 = Preparation and characterization of iridium bottom electrode by DC magnetron sputtering and characterization of $(Ba,Sr)TiO_3$ thin filmlink 박정호; Park, Jeong-Ho; et al, 한국과학기술원, 1998 |
Effect of a TiO2 buffer layer on the CV properties of Pt/PbTiO3/TiO2/Si structure Byun, C; Kim, YI; Lee, Won-Jong; Lee, BW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.36, no.9A , pp.5588 - 5589, 1997-04 |
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