표면 전도도를 이용한 금속산화막반도체 전계효과 트랜지스터 습도센서Metal-Oxide-Semiconductor Field Effect Transistor Humidity Sensor Using Surface Conductance
- Publisher
- 한국MEMS학술대회
- Issue Date
- 2012-04-05
- Language
- KOR
- Citation
제14회 한국MEMS학술대회, pp.457 - 458
- Appears in Collection
- EE-Conference Papers(학술회의논문)
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