DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Min-Wu | ko |
dc.contributor.author | Song, Yong-Ha | ko |
dc.contributor.author | Yang, Hyun-Ho | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2013-08-08T06:02:54Z | - |
dc.date.available | 2013-08-08T06:02:54Z | - |
dc.date.created | 2013-04-26 | - |
dc.date.created | 2013-04-26 | - |
dc.date.issued | 2013-04 | - |
dc.identifier.citation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.23, no.4 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/174809 | - |
dc.description.abstract | In this paper, an ultra-low voltage microelectromechanical system (MEMS) switch is proposed, modeled and demonstrated. Through the introduction of torsional hinges, stiction-recovery actuation was possible, and thus irreversible stiction could be overcome. Owing to this see-saw-like actuation, the switch could be freely designed to have low stiffness resulting in an ultra-low actuation voltage. The proposed switch shows an actuation voltage of around 3 V, which is especially low compared with typical values of several tens of volts in conventional microelectromechanical switches. Variation of the actuation voltage stayed under 12% during 10(6) cycles. Switching performance was degraded by an increase of contact resistance rather than in-use stiction. Using the proposed switches, low-voltage mechanical logic gates were also proposed and successfully demonstrated, operating at V-DD of 3 V. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | PULL-IN | - |
dc.title | An ultra-low voltage MEMS switch using stiction-recovery actuation | - |
dc.type | Article | - |
dc.identifier.wosid | 000316299900023 | - |
dc.identifier.scopusid | 2-s2.0-84878157780 | - |
dc.type.rims | ART | - |
dc.citation.volume | 23 | - |
dc.citation.issue | 4 | - |
dc.citation.publicationname | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.identifier.doi | 10.1088/0960-1317/23/4/045022 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Song, Yong-Ha | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | PULL-IN | - |
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