Piezoelectric BaTiO3 Thin Film Nanogenerator on Plastic Substrates

Abstract

The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time rerroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO2/(100) Si substrate and poled under an electric field of 100 kV/cm The metal-insulator (BaTiO3)-metal structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes When periodically deformed by a bending stage a flexible BaTiO3 nanogenerator can generate an output voltage of up to 1 0 V The fabricated nanogenerator produced an output current density of 0 19 mu 4/k/cm(2) and a power density of similar to 7 mW/cm(3) The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies