전해 프로세스를 이용한 미세축 제작Fabrication of Microshafts using Electrochemical Process

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We proposed a new fabrication method using electrochemical process for microshafts. This method is a kind of atomic removal process by chemical reaction. Therefore, it is possible to make thin and long shafts regardless of the stiffness of materials. Because shaping process is simply switched to polishing process by varying process conditions, we can precisely fabricate microshafts with very smooth surface. We also fabricated a very thin shaft with the diameter as small as 10μm and a microshaft with high aspect ratio.
Publisher
한국정밀공학회
Issue Date
2001-03
Language
Korean
Citation

한국정밀공학회지, v.18, no.3, pp.169 - 174

ISSN
1225-9071
URI
http://hdl.handle.net/10203/173666
Appears in Collection
ME-Journal Papers(저널논문)
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