DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진형 | ko |
dc.contributor.author | 이순복 | ko |
dc.date.accessioned | 2013-04-11T08:51:47Z | - |
dc.date.available | 2013-04-11T08:51:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-06 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.31, no.6, pp.659 - 664 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/173494 | - |
dc.description.abstract | Moire interferometry is a useful technique to assess the reliability of electronic package because Moire interferometry can measure the whole-field and real-time deformations. The shear strain of a small crack site is important to the reliability assessment of electronic package. The optical limitation of Moire interferometry makes ambiguous the shear strain of a small area. An atomic force microscope (AFM) is used to measure the profile of a micro site. High resolution of AFM can apply to the Moire technique. AFM Moire technique is useful to measure the shear strain of a small area. In this research, the method to accurately measure the deformation of a small area by using AFM Moire is proposed. A phase-shifting method is applied to improve the resolution of AFM Moire. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 고분해능 원자 현미경 스캐닝 무아레 기법을 이용한 미소 영역의 변형량 측정 | - |
dc.title.alternative | Measurement of Deformations in Micro-Area Using High Resolution AFM Scanning Moir? Technique | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 31 | - |
dc.citation.issue | 6 | - |
dc.citation.beginningpage | 659 | - |
dc.citation.endingpage | 664 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.identifier.kciid | ART001069174 | - |
dc.contributor.localauthor | 이순복 | - |
dc.contributor.nonIdAuthor | 박진형 | - |
dc.subject.keywordAuthor | AFM(원자 현미경) | - |
dc.subject.keywordAuthor | Moir& | - |
dc.subject.keywordAuthor | eacute | - |
dc.subject.keywordAuthor | (무아레) | - |
dc.subject.keywordAuthor | ACF(이방성 도체 필름) | - |
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