Feedback control design for cluster tools with wafer residency time constraints
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Chulhan | ko |
| dc.contributor.author | Lee, Tae-Eog | ko |
| dc.date.accessioned | 2013-03-29T18:44:10Z | - |
| dc.date.available | 2013-03-29T18:44:10Z | - |
| dc.date.created | 2012-11-06 | - |
| dc.date.created | 2012-11-06 | - |
| dc.date.issued | 2012-10-17 | - |
| dc.identifier.citation | IEEE Conference on Systems, Man, and Cybernetics | - |
| dc.identifier.uri | http://hdl.handle.net/10203/172920 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Feedback control design for cluster tools with wafer residency time constraints | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000316869203032 | - |
| dc.identifier.scopusid | 2-s2.0-84872385140 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | IEEE Conference on Systems, Man, and Cybernetics | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | Seoul COEX | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Kim, Chulhan | - |
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