Fabrication of ultrathick 3D nanostructures patterned through PnP with silicate based photoresists
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeon, Seokwoo | - |
| dc.contributor.author | Ahn, Changui | - |
| dc.date.accessioned | 2013-03-29T16:15:05Z | - |
| dc.date.available | 2013-03-29T16:15:05Z | - |
| dc.date.created | 2012-08-16 | - |
| dc.date.issued | 2012-01-09 | - |
| dc.identifier.citation | International Symposium on Nature-Inspired Technology(ISNIT), v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/172047 | - |
| dc.language | ENG | - |
| dc.publisher | 한국기계연구원, 한국과학기술연구원 | - |
| dc.title | Fabrication of ultrathick 3D nanostructures patterned through PnP with silicate based photoresists | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Symposium on Nature-Inspired Technology(ISNIT) | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Jeon, Seokwoo | - |
| dc.contributor.nonIdAuthor | Ahn, Changui | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.