Conductive Alignment Layer for Liquid Crystal Control via High Resolution ITO Nanopattern with High Aspect Ratio

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 386
  • Download : 0
We describe a novel method for liquid crystal (LC) alignment using nano-patterns of electrically conductive indium-tin-oxide (ITO) layers with high resolution (ca < 20nm) and high aspect ratio (ca. 8), fabricated by the second sputtering lithography (SSL). The ITO pattern developed in this manner not only provides high anchoring energy comparable to that of rubbed polyimides, but also maintains its low resistivity as an electrode. As a result, the patterned ITO can function as an electrode and alignment layer at the same time, which facilitates successful fabrication of bifunctional conductive alignment layer for LC devices. The LC cells fabricated using patterned ITO substrates show highly stable alignment of LCs over large area and good electro-optical responses. Moreover, systematic approach made by the precise control of pattern dimensions allows us to estimate a critical anchoring energy required for an effective LC alignment based on Berremans’ theory.
Issue Date

2011 추계학술대회 , v.36, no.2

Appears in Collection
CBE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.


  • mendeley


rss_1.0 rss_2.0 atom_1.0