Measurement and Compensation of Bar-mirror Flatness And Squareness Error Using High Precision Stage

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dc.contributor.authorWoo, Siwoong-
dc.contributor.authorAhn, Dahoon-
dc.contributor.authorGweon, Dae-Gab-
dc.contributor.authorLee, Sunho-
dc.contributor.authorPark, Junkyu-
dc.date.accessioned2013-03-29T14:47:40Z-
dc.date.available2013-03-29T14:47:40Z-
dc.date.created2012-08-13-
dc.date.issued2011-11-16-
dc.identifier.citation26th(2011) Annual Meeting of the American Society for Precision Engineering, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/171490-
dc.languageENG-
dc.titleMeasurement and Compensation of Bar-mirror Flatness And Squareness Error Using High Precision Stage-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname26th(2011) Annual Meeting of the American Society for Precision Engineering-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorWoo, Siwoong-
dc.contributor.nonIdAuthorAhn, Dahoon-
dc.contributor.nonIdAuthorLee, Sunho-
dc.contributor.nonIdAuthorPark, Junkyu-
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ME-Conference Papers(학술회의논문)
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