Shape controlled nanoparticles can be used as a tool to enhance the electronic, optical, and magnetic properties of solid materials. In order to meet the requirements of advanced nano-structures, many researches for various shaped nanoparticles have been challenging over many years. Until now, many research activities are mostly focused on growth synthesis methods by using HAuCl4, AgNO3. These “bottom-up” methods have advantages of good productivity since many particles can be fabricated from many synthesized seeds simultaneously in aqueous system. However, these methods have limitations in shape control and size uniformity of nanoparticle. Here, we have developed the formation of highly uniform 3-dimensional nanostructures by our unique “top-down” method, named secondary sputtering lithography (SSL). Through nano-structure transfer process from substrate to water solution via PEDOT sacrifice layer, various shaped nano particles are dispersed in aqueous solution very easily.