AlIgnment control of Liquid Crystal Molecules using sub 20nm Indium Tin oxide Pattern

Abstract

We describe a new molecule alignment technique using second sputtering lithography that enables fabrication of ultrahigh-resolution (ca< 15nm) and high aspect ratio (ca. 10) patterns of indium tin oxide (ITO). We found that the patterned ITO simultaneously acts as an electrode and nano-groove for the alignment of liquid crystal (LC) molecules over large area without any alignment layers. This method not only avoids the high-temperature process, dust and ion contamination caused by previous methods employing polymers for alignment layers, but also provides systematic studies of anchoring energy in terms of height and period of ITO pattern that allow us to investigate critical dimensions of pattern for the alignment of LCs. Good electro-optical responses from liquid crystal light modulators that are formed in this manner suggest utility for fundamental studies and potential practical future application such as flexible display.