미세접촉인쇄기법을 이용한 Zinc Oxide 기능성 나노구조체 형성에 관한 연구

Abstract

We introduce a novel and simple process for the selective and localized Zinc oxide nanoscale functional structure formation. This process is based on hydrothermal reaction with locally patterned Zinc oxide seed material by using the micro contact printing method. Elastomeric polymer stamp for Zinc oxide seed material patterning is fabricated by soft lithographic technique. The shape of Zinc oxide structure is controlled by elastomeric stamp design and can be applied various substrates like Si wafer, glass and flexible plastics. After patterning Zinc oxide seed material, the hydrothermal reaction of the Zinc oxide precursor solution induces locally grown Zinc oxide structure. The fabrication process presented this study will be applied electrical and mechanical devices.