The fabrication of complex patterns with high resolution and high aspect ratio pver large area by repetitive secondary sputtering lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전환진 | - |
| dc.contributor.author | 정현수 | - |
| dc.contributor.author | 김종선 | - |
| dc.contributor.author | 정희태 | - |
| dc.date.accessioned | 2013-03-29T11:05:05Z | - |
| dc.date.available | 2013-03-29T11:05:05Z | - |
| dc.date.created | 2012-07-06 | - |
| dc.date.issued | 2012-04-26 | - |
| dc.identifier.citation | 2012 봄 총회 및 학술대회 한국화학공학회, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/170281 | - |
| dc.language | KOR | - |
| dc.publisher | 한국화학공학회 | - |
| dc.title | The fabrication of complex patterns with high resolution and high aspect ratio pver large area by repetitive secondary sputtering lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2012 봄 총회 및 학술대회 한국화학공학회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 정희태 | - |
| dc.contributor.nonIdAuthor | 전환진 | - |
| dc.contributor.nonIdAuthor | 정현수 | - |
| dc.contributor.nonIdAuthor | 김종선 | - |
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