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CHARACTERIZATION OF SPIN-COATED SILICATE AND PHOSPHOSILICATE THIN-FILMS PREPARED BY THE SOL-GEL METHOD NAM, CW; Woo, Seong-Ihl, THIN SOLID FILMS, v.237, no.1-2, pp.314 - 319, 1994-01 |
EFFECT OF CO AND CO2 ADDITION TO THE CF4/O-2 GAS SYSTEM ON THE ETCHING OF A LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION TUNGSTEN FILM KWON, SK; KIM, KN; NAM, CW; Woo, Seong-Ihl, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.13, no.3, pp.914 - 917, 1995-05 |
THE EFFECT OF DILUENT GAS AND RAPID THERMAL ANNEALING ON THE PROPERTIES OF PLASMA-DEPOSITED SILICON-NITRIDE FILMS NAM, CW; Woo, Seong-Ihl; KIM, YT; MIN, SK, THIN SOLID FILMS, v.209, no.2, pp.215 - 222, 1992-03 |
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