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Fabrication of 10nm scale nanogap structures through metal pattern embedded stamp = 금속 패턴이 결합된 스탬프를 통한 10 나노 수준 갭 구조체의 제조 및 응용 연구link Lee, Eun-Hyung; 이은형; et al, 한국과학기술원, 2013 |
Fabrication of complex 3-dimensional patterned structures on a similar to 10 nm scale from a single master pattern by secondary sputtering lithography Jeon, Hwan-Jin; Yoo, Hae-Wook; Lee, Eun-Hyung; Jang, Sung-Woo; Kim, Jong-Seon; Choi, Jong-Kil; Jung, Hee-Tae, NANOSCALE, v.5, no.6, pp.2358 - 2363, 2013-01 |
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