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Computer simulation of APCVD process for amorphous SiC thin film on silicon wafer Koh, JH; Woo, Seong-Ihl, International Conference on VLSI and CAD, pp.248 - 251, 1989 |
Modelling and Simulation Study on Chemical Vapor Deposition Process for Silicon Carbide Film Koh, JH; Woo, Seong-Ihl, The Conference on Semi-conductors, Materizals, Components and Computer Aided Design, pp.112 -, 1988 |
Modelling Study of Chemical Vapor Deposition Reaction Koh, JH; Woo, Seong-Ihl, 한국화학공학회 추계학술발표회, 한국화학공학회, 1987-10 |
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