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Control of wafer temperature uniformity in rapid thermal processing using an optimal iterative learning control technique Lee, KS; Lee, J; Chin, I; Choi, J; Lee, JayHyung, INDUSTRIAL ENGINEERING CHEMISTRY RESEARCH, v.40, no.7, pp.1661 - 1672, 2001-04 |
Integrated quality and tracking control of a batch PMMA reactor using a QBMPC technique Chae, DC; Chin, I; Lee, KS; Rho, H; Rhee, H; Lee, JayHyung, COMPUTERS CHEMICAL ENGINEERING, v.24, no.2-7, pp.953 - 958, 2000-07 |
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