Browse "Dept. of Chemical and Biomolecular Engineering(생명화학공학과)" byAuthorBae, S.H.

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Performance of polishing slurries containing silica particles grown by sol-gel method

Bae, S.H.; So, J.-H.; Yang, Seung-Manresearcher; Kim, D.H., Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues, v.613, pp.114 - 115, 2000-04-26

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