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Self-assembly of block copolymer thin films sandwiched by neutral polymer layers via initiated chemical vapor deposition for sub-10 nm nanoscale patterning 오슬아; 왕현숙; 최준환; 방준하; 임성갑, 2018 추계 한국화학공학회, 한국화학공학회, 2018-10-25 |
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