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Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process Kim, Jae Hwan; Park, Hongkeun; Pak, Kwanyong; Yoon, Alexander; Kim, Yun Sang; Im, Sung Gap; Hwang, Wan Sik; et al, 64th IEEE International Electron Devices Meeting (IEDM 2018), IEEE, 2018-12-04 |
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