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Performance of polishing slurries containing silica particles grown by sol-gel method Bae, S.H.; So, J.-H.; Yang, Seung-Man; Kim, D.H., Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues, v.613, pp.114 - 115, 2000-04-26 |
Performance of Sol-Gel Grown Silica Slurries in the Polishing of Silicon Wafer Bae, S. H.; So, J.-H.; Yang, S.-M.; Kim, DoHyun, Proc. 12th Intern. Symposium on Chemical Engineering, pp.147 - 148, 1999-10 |
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