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Polymerization, characterization & Evaluation of poly(N-(tert-butoxy-carbonyloxyphenyl) maleimde/styrene/maleimide) for new electron-beam resists Ko, YS; Kim, ST; Ahn, KD; Woo, Seong-Ihl, 1992 한국고분자학회 학술발표회, 한국고분자학회, 1992 |
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