갈바노미터 스캐너 시스템을 이용하는 레이저 미세 가공에서의 빔 쉐이핑Beam shaping in laser micromachining with a galvanometer scanner system

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dc.contributor.author나석주-
dc.contributor.author안준수-
dc.contributor.author이제훈-
dc.date.accessioned2013-03-29T08:00:21Z-
dc.date.available2013-03-29T08:00:21Z-
dc.date.created2012-06-26-
dc.date.issued2011-10-14-
dc.identifier.citationAutumn Annual Conference of KSMTE, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/169232-
dc.languageKOR-
dc.publisher한국생산제조시스템학회-
dc.title갈바노미터 스캐너 시스템을 이용하는 레이저 미세 가공에서의 빔 쉐이핑-
dc.title.alternativeBeam shaping in laser micromachining with a galvanometer scanner system-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameAutumn Annual Conference of KSMTE-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor나석주-
dc.contributor.nonIdAuthor안준수-
dc.contributor.nonIdAuthor이제훈-
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ME-Conference Papers(학술회의논문)
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