Cluster tool design comparisons via simulation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Kyungsu | - |
| dc.contributor.author | Morrison, James R | - |
| dc.date.accessioned | 2013-03-29T07:46:28Z | - |
| dc.date.available | 2013-03-29T07:46:28Z | - |
| dc.date.created | 2012-06-20 | - |
| dc.date.issued | 2011-12 | - |
| dc.identifier.citation | 7th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference, v., no., pp.1877 - 1887 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/169145 | - |
| dc.language | ENG | - |
| dc.publisher | MASM | - |
| dc.title | Cluster tool design comparisons via simulation | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1877 | - |
| dc.citation.endingpage | 1887 | - |
| dc.citation.publicationname | 7th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Morrison, James R | - |
| dc.contributor.nonIdAuthor | Park, Kyungsu | - |
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