금속이온과 나노입자를 함유한 수용액을 이용한 이광자 흡수 광환원 공정 정밀화에 관한 연구

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dc.contributor.authorSon, Yong-
dc.contributor.authorLim, Tae Woo-
dc.contributor.authorYANG DONG YOL-
dc.contributor.authorPrabhakaran, Prem-
dc.contributor.authorLee, Kwang-Sup-
dc.date.accessioned2013-03-29T06:54:15Z-
dc.date.available2013-03-29T06:54:15Z-
dc.date.created2012-02-06-
dc.date.issued2011-04-
dc.identifier.citationKMEMS, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/168825-
dc.description.abstractIn this study, direct fabrication of metallic micro-patterns with a high spatial resolution is tried employing the two-photon induced photoreduction process. A metallic pattern is fabricated by means of photoreduction of the metallic solution using a femtosecond laser. The metallic solution is composed of metallic salt, and a polymer which serves a uniform arrangement of silver ions. For an efficient fabrication, continuous forming window is obtained and direct seed generation method is proposed, generating metallic nano-particles in the metallic solution. Through this work, precise silver lines and two dimensional micro-patterns with a minimum width of 400nm are fabricated using the developed process.-
dc.languageKOR-
dc.publisher(사)마이크로나노시스템학회-
dc.title금속이온과 나노입자를 함유한 수용액을 이용한 이광자 흡수 광환원 공정 정밀화에 관한 연구-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameKMEMS-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorYANG DONG YOL-
dc.contributor.nonIdAuthorSon, Yong-
dc.contributor.nonIdAuthorLim, Tae Woo-
dc.contributor.nonIdAuthorPrabhakaran, Prem-
dc.contributor.nonIdAuthorLee, Kwang-Sup-
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ME-Conference Papers(학술회의논문)
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