Development of Self-Aligned RTDs using a SiNx Sidewall Process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, H | - |
| dc.contributor.author | Lee, J | - |
| dc.contributor.author | 양경훈 | - |
| dc.date.accessioned | 2013-03-29T06:31:33Z | - |
| dc.date.available | 2013-03-29T06:31:33Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010 | - |
| dc.identifier.citation | Korean Conference on Semiconductors, v., no., pp.564 - 565 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/168667 | - |
| dc.language | ENG | - |
| dc.title | Development of Self-Aligned RTDs using a SiNx Sidewall Process | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 564 | - |
| dc.citation.endingpage | 565 | - |
| dc.citation.publicationname | Korean Conference on Semiconductors | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 양경훈 | - |
| dc.contributor.nonIdAuthor | Lee, H | - |
| dc.contributor.nonIdAuthor | Lee, J | - |
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