DC Field | Value | Language |
---|---|---|
dc.contributor.author | Han, S | - |
dc.contributor.author | Kim, Y | - |
dc.contributor.author | Kim,YJ | - |
dc.contributor.author | Kim, S | - |
dc.contributor.author | Park, S | - |
dc.contributor.author | Park, J | - |
dc.contributor.author | Kim, Seung-Woo | - |
dc.date.accessioned | 2013-03-29T02:02:49Z | - |
dc.date.available | 2013-03-29T02:02:49Z | - |
dc.date.created | 2012-03-21 | - |
dc.date.issued | 2011-06-29 | - |
dc.identifier.citation | the10th International Symposium on Measurement Technology and Intelligent Instruments, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/168040 | - |
dc.language | ENG | - |
dc.publisher | International Symposium on Measurement Technology and Intelligent Instruments | - |
dc.title | Design of non-thermal dicing system for quartz wafers | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | the10th International Symposium on Measurement Technology and Intelligent Instruments | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Han, S | - |
dc.contributor.nonIdAuthor | Kim, Y | - |
dc.contributor.nonIdAuthor | Kim,YJ | - |
dc.contributor.nonIdAuthor | Kim, S | - |
dc.contributor.nonIdAuthor | Park, S | - |
dc.contributor.nonIdAuthor | Park, J | - |
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