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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Design of non-thermal dicing system for quartz wafers

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dc.contributor.authorHan, S-
dc.contributor.authorKim, Y-
dc.contributor.authorKim,YJ-
dc.contributor.authorKim, S-
dc.contributor.authorPark, S-
dc.contributor.authorPark, J-
dc.contributor.authorKim, Seung-Woo-
dc.date.accessioned2013-03-29T02:02:49Z-
dc.date.available2013-03-29T02:02:49Z-
dc.date.created2012-03-21-
dc.date.issued2011-06-29-
dc.identifier.citationthe10th International Symposium on Measurement Technology and Intelligent Instruments, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/168040-
dc.languageENG-
dc.publisherInternational Symposium on Measurement Technology and Intelligent Instruments-
dc.titleDesign of non-thermal dicing system for quartz wafers-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnamethe10th International Symposium on Measurement Technology and Intelligent Instruments-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorHan, S-
dc.contributor.nonIdAuthorKim, Y-
dc.contributor.nonIdAuthorKim,YJ-
dc.contributor.nonIdAuthorKim, S-
dc.contributor.nonIdAuthorPark, S-
dc.contributor.nonIdAuthorPark, J-
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ME-Conference Papers(학술회의논문)
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