광산란 현상을 이용한 대면적 패턴의 표면 결함측정Defect inspection of large patterned surface using scattered light
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김승우 | - |
| dc.contributor.author | 주우덕 | - |
| dc.date.accessioned | 2013-03-29T01:50:35Z | - |
| dc.date.available | 2013-03-29T01:50:35Z | - |
| dc.date.created | 2012-03-20 | - |
| dc.date.issued | 2010-05-26 | - |
| dc.identifier.citation | 한국정밀공학회 2010년도 춘계학술대회, v.10, no., pp.831 - 832 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/167951 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 광산란 현상을 이용한 대면적 패턴의 표면 결함측정 | - |
| dc.title.alternative | Defect inspection of large patterned surface using scattered light | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 10 | - |
| dc.citation.beginningpage | 831 | - |
| dc.citation.endingpage | 832 | - |
| dc.citation.publicationname | 한국정밀공학회 2010년도 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 주우덕 | - |
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