초기응력을 가진 기저구조물을 이용한 국면형 압전 유니모프 개발

Abstract

This paper proposes a novel curved shape piezoelectric unimorph using a new fabrication method. Instead of using thermal coefficient mismatch, which has been used for conventional processes for curved shape unimorphs, we used pre-stressed substrates and the room temperature adhesion process. A difference of the mechanical strains between the substrate and the piezoelectric layer makes the final manufactured unimorph get curved. Several performance tests of the proposed unimorph actuators were accomplished and the test results showed the proposed unimorph actuator got comparable actuation capability compared with conventional curved shape actuators.