초기응력을 가진 기저구조물을 이용한 국면형 압전 유니모프 개발Development of Curved Shape Piezoelectric Unimorph Using Pre-stressed Substrate

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This paper proposes a novel curved shape piezoelectric unimorph using a new fabrication method. Instead of using thermal coefficient mismatch, which has been used for conventional processes for curved shape unimorphs, we used pre-stressed substrates and the room temperature adhesion process. A difference of the mechanical strains between the substrate and the piezoelectric layer makes the final manufactured unimorph get curved. Several performance tests of the proposed unimorph actuators were accomplished and the test results showed the proposed unimorph actuator got comparable actuation capability compared with conventional curved shape actuators.
Publisher
한국소음진동공학회
Issue Date
2009-01
Keywords

압전; 압전세라믹; 작동기; 벤더; 유니모프

Citation

한국소음진동학회논문집, Vol.19, No.1, pp.94-100

ISSN
1598-2785
URI
http://hdl.handle.net/10203/16753
Link
http://www.ksnve.or.kr/main.htm
Appears in Collection
AE-Journal Papers(저널논문)

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