Maneuvering actuation voltage of a electrostatic MEMS switch with a new coplanar pre-charged electrode
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yang, H.-H. | ko |
| dc.contributor.author | Choi, D.-H. | ko |
| dc.contributor.author | Lee, J.O. | ko |
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.date.accessioned | 2013-03-28T14:36:36Z | - |
| dc.date.available | 2013-03-28T14:36:36Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010-01-24 | - |
| dc.identifier.citation | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.747 - 750 | - |
| dc.identifier.issn | 1084-6999 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/166538 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Maneuvering actuation voltage of a electrostatic MEMS switch with a new coplanar pre-charged electrode | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000278416400185 | - |
| dc.identifier.scopusid | 2-s2.0-77952781039 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 747 | - |
| dc.citation.endingpage | 750 | - |
| dc.citation.publicationname | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 | - |
| dc.identifier.conferencecountry | HK | - |
| dc.identifier.conferencelocation | Hong Kong | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Yang, H.-H. | - |
| dc.contributor.nonIdAuthor | Choi, D.-H. | - |
| dc.contributor.nonIdAuthor | Lee, J.O. | - |
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