DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Dongwoo | ko |
dc.contributor.author | Kim, Jungjae | ko |
dc.contributor.author | Lee, Moon G. | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2010-02-10T07:01:34Z | - |
dc.date.available | 2010-02-10T07:01:34Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-02 | - |
dc.identifier.citation | REVIEW OF SCIENTIFIC INSTRUMENTS, v.79, no.2 | - |
dc.identifier.issn | 0034-6748 | - |
dc.identifier.uri | http://hdl.handle.net/10203/16602 | - |
dc.description.abstract | In this article, a linear piezoelectric stepping positioner developed by Kang et al. [Rev. Sci. Instrum. 78, 075112 (2007)] is extended to have a two degree of freedom XY linear motion and it is experimentally evaluated. A resolution less than 10 nm, a speed of over 0.5 mm/s, push forces of 17.9 and 19.5, and stiffnesses of 6.54 and 5.90 N/mu m are attained while maintaining a compact size of 96 X 96 X 39 mm(3) and the required power consumption of 102.74 W. (C) 2008 American Institute of Physics. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Development of compact high precision two degree of freedom XY piezoelectric stepping positioner | - |
dc.type | Article | - |
dc.identifier.wosid | 000254194400067 | - |
dc.identifier.scopusid | 2-s2.0-40149087708 | - |
dc.type.rims | ART | - |
dc.citation.volume | 79 | - |
dc.citation.issue | 2 | - |
dc.citation.publicationname | REVIEW OF SCIENTIFIC INSTRUMENTS | - |
dc.identifier.doi | 10.1063/1.2841807 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Lee, Moon G. | - |
dc.type.journalArticle | Article | - |
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