Development of compact high precision two degree of freedom XY piezoelectric stepping positioner

Cited 6 time in webofscience Cited 8 time in scopus
  • Hit : 382
  • Download : 585
In this article, a linear piezoelectric stepping positioner developed by Kang et al. [Rev. Sci. Instrum. 78, 075112 (2007)] is extended to have a two degree of freedom XY linear motion and it is experimentally evaluated. A resolution less than 10 nm, a speed of over 0.5 mm/s, push forces of 17.9 and 19.5, and stiffnesses of 6.54 and 5.90 N/mu m are attained while maintaining a compact size of 96 X 96 X 39 mm(3) and the required power consumption of 102.74 W. (C) 2008 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2008-02
Language
English
Article Type
Article
Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.79, no.2

ISSN
0034-6748
DOI
10.1063/1.2841807
URI
http://hdl.handle.net/10203/16602
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 6 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0