Development of compact high precision two degree of freedom XY piezoelectric stepping positioner

Abstract

In this article, a linear piezoelectric stepping positioner developed by Kang et al. [Rev. Sci. Instrum. 78, 075112 (2007)] is extended to have a two degree of freedom XY linear motion and it is experimentally evaluated. A resolution less than 10 nm, a speed of over 0.5 mm/s, push forces of 17.9 and 19.5, and stiffnesses of 6.54 and 5.90 N/mu m are attained while maintaining a compact size of 96 X 96 X 39 mm(3) and the required power consumption of 102.74 W. (C) 2008 American Institute of Physics.