BEAM SCANNING CONFOCAL DIFFERENTIAL HETERODYNE INTERFEROMETRY

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dc.contributor.authorSong, Cheolko
dc.contributor.authorKim, Tae Joongko
dc.contributor.authorGweon, Dae-Gabko
dc.date.accessioned2010-02-10T05:58:45Z-
dc.date.available2010-02-10T05:58:45Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2007-
dc.identifier.citationINTERNATIONAL JOURNAL OF OPTOMECHATRONICS, v.1, no.1, pp.27 - 45-
dc.identifier.issn1559-9612-
dc.identifier.urihttp://hdl.handle.net/10203/16588-
dc.description.abstractThis article presents a new approach to the design of confocal differential heterodyne interferometer (CDHI), which is a combination of differential heterodyne interferometer (DHI) with confocal laser scanning microscopy (CLSM). The CDHI can measure a step height over a quarter of wavelength of the light source, which can not be accurately measured by DHI and CLSM, respectively. The approach is that it utilizes a beam-scanning method instead of transporting a sample to be measured. The measurement results carried out for samples having step height are found to be comparable in precision with those measured by commercial scanning electron microscopes.-
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherTAYLOR FRANCIS INC-
dc.titleBEAM SCANNING CONFOCAL DIFFERENTIAL HETERODYNE INTERFEROMETRY-
dc.typeArticle-
dc.identifier.wosid000207178400003-
dc.type.rimsART-
dc.citation.volume1-
dc.citation.issue1-
dc.citation.beginningpage27-
dc.citation.endingpage45-
dc.citation.publicationnameINTERNATIONAL JOURNAL OF OPTOMECHATRONICS-
dc.identifier.doi10.1080/15599610701261076-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorSong, Cheol-
dc.contributor.nonIdAuthorKim, Tae Joong-
dc.type.journalArticleArticle-
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