BEAM SCANNING CONFOCAL DIFFERENTIAL HETERODYNE INTERFEROMETRY

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This article presents a new approach to the design of confocal differential heterodyne interferometer (CDHI), which is a combination of differential heterodyne interferometer (DHI) with confocal laser scanning microscopy (CLSM). The CDHI can measure a step height over a quarter of wavelength of the light source, which can not be accurately measured by DHI and CLSM, respectively. The approach is that it utilizes a beam-scanning method instead of transporting a sample to be measured. The measurement results carried out for samples having step height are found to be comparable in precision with those measured by commercial scanning electron microscopes.
Publisher
TAYLOR FRANCIS INC
Issue Date
2007
Language
English
Article Type
Article
Citation

INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, v.1, no.1, pp.27 - 45

ISSN
1559-9612
DOI
10.1080/15599610701261076
URI
http://hdl.handle.net/10203/16588
Appears in Collection
ME-Journal Papers(저널논문)
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